Grazing-incidence transmission X-ray scattering: surface scattering in the Born approximation

Lu, X.; Yager, K.G.; Johnston, D.; Black, C.T.; Ocko, B.M.

doi:10.1107/S0021889812047887

Figure 3
(a) Scattering images of a silicon grating at an incident angle of $[\alpha_{\rm i}]$ = 0.76°. The direct beam position (q_z = 0) and the surface horizon position ( $[\alpha_{\rm f}= 0]$ ) are denoted by the black dotted line and the blue solid line, respectively. (b) A cross-sectional SEM view of the grating. It is modeled by a rectangular shape with a trapezoidal bottom. (c) The intensity profile along q_z of first- (blue) and fourth-order (red) BRs [taken from the rectangular areas marked in panel (a)], fitted with the corresponding form factor (solid lines). (d) A three-dimensional representation of the form factor of the modeled shape shown in panel (b).