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Figure 2
(a) CTR profiles for samples A1–A7 derived from RSMs of the 00.8 reflections. The profiles were shifted vertically in order to make the changes in peak positions and intensities visible as a function of the overgrowth thicknesses. It is observed that the intensity of peak 3 decreases while that of peak 4 increases. (b) The CTR profile of the 00.8 reflection and the corresponding decomposed peaks for sample A1, where the overgrowth layer is 90 nm, i.e. lower than the thickness of the 150 nm AlGaN interlayer. The intensity of peak 3 is higher than that of peak 4. (c) The CTR profile of the 00.8 reflection and the corresponding decomposed peaks for sample A7, where the overgrowth layer is 3500 nm, i.e. higher than the thickness of the 150 nm AlGaN interlayer. Peak 4 is dominant because of the increase of the diffracting volume coming from the overgrowth layer.

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CRYSTALLOGRAPHY
ISSN: 1600-5767
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