
Figure 7
Comparison of the preedge peak intensity of the VAlCN coatings and the calculated preedge peak intensity of VC with similar coating thickness. (a) Maximum intensity I_{max} as a function of the incident angle , (b) I_{max} measured at for different positions X below the target, (c) intensity difference I_{F} = I_{max}  I_{min} as a function of , and (d) I_{F} at different X. Experimental data for coatings on cemented carbide (filled squares) and on Si(001) (black dots) are shown. The calculated values for VC assuming the thickness of the coatings on cemented carbide and on Si(001) are represented by open squares and open circles. 