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Figure 7
Comparison of the pre-edge peak intensity of the V–Al–C–N coatings and the calculated pre-edge peak intensity of VC with similar coating thickness. (a) Maximum intensity Imax as a function of the incident angle Φ, (b) Imax measured at [\Phi = 45^{\circ}] for different positions X below the target, (c) intensity difference ΔIF = ImaxImin as a function of Φ, and (d) ΔIF at different X. Experimental data for coatings on cemented carbide (filled squares) and on Si(001) (black dots) are shown. The calculated values for VC assuming the thickness of the coatings on cemented carbide and on Si(001) are represented by open squares and open circles.

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