Figure 1
SEM images of (a) undoped sample (A) of series 1, (b) sample (B) with doping level 1 × 1017 cm-3 from series 1, (c) sample (C) with doping level 1 × 1018 cm-3 from series 1 and (d) sample (D) from series 2 with doping level 1 × 1017 cm-3. (e) Large area image of sample (B); places of damaged oxide surface are marked with red lines.  [article HTML]