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Figure 1
Relative concentration of displaced lattice atoms versus depth for the samples implanted with 64Zn+ ions at an energy of 100 keV and an ion dose of 2 × 1016 cm−2: curve 1 is for the as-implanted sample; curves 2, 3 and 4 correspond to samples subsequently annealed at 873, 973 and 1173 K, respectively.

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