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Figure 2
Strain zz(z) (curve 1) and static Debye–Waller factor exp(−LH)(z) (curve 2) depth profiles. (a) As implanted, and (b) annealed at 873 K, (c) 973 K and (d) 1173 K. The black curve is the strain profile; the red curve is a factor of the exp(−LH)(z) depth profile. The hatched area in (a)–(c) corresponds to the amorphous layer in accordance with the RBS data.

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