Figure 2
Strain [epsilon]zz(z) (curve 1) and static Debye-Waller factor exp(-LH)(z) (curve 2) depth profiles. (a) As implanted, and (b) annealed at 873 K, (c) 973 K and (d) 1173 K. The black curve is the strain profile; the red curve is a factor of the exp(-LH)(z) depth profile. The hatched area in (a)-(c) corresponds to the amorphous layer in accordance with the RBS data.  [article HTML]