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Figure 4
Zn depth profile measured by SIMS for the samples implanted with 64Zn+ ions at an energy of 100 keV and an ion dose of 2 × 1016 cm−2.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 46| Part 4| June 2013| Pages 882-886
doi:10.1107/S0021889813010169
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