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Figure 1
(a) Design of the multilayer assumed for the derivation of model equations that are employed to analyse the depth profiles of the residual stress. The multilayer consists of two materials (phases a and b), alternately deposited on a substrate (phase c). (b) Schematic of the design of the multilayers used to demonstrate the applicability of the new measuring and evaluation strategy experimentally. The layers of phases a (TiAlN) and b (Ti) have uniform thicknesses, ta and tb, respectively.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 47| Part 1| February 2014| Pages 335-345
doi:10.1107/S1600576713030951
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