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Figure 2
Scanning ion micrograph of the test pattern fabricated on 0.5 µm gold foil. Chinese characters meaning `up' are arranged in a 5 × 5 matrix. Each character has its own reference dot on the lower left. Scale bar: 1 µm. Inset: average of the images of 25 characters (2× magnification).

Journal logoJOURNAL OF
SYNCHROTRON
RADIATION
ISSN: 1600-5775
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