The local diffraction intensity across a tMLL and wMLL with ∊ = 0.5 at the pupil plane. The MLL size is 62 µm, and the zone width varies from 2.5 to 5 nm. The tilting angle is 0.25° for the tMLL and 0° for the wMLL. The section depth is 10.6 µm for the tMLL (to achieve π phase change in two adjacent zones) and 16.5 µm (to achieve an optimal efficiency accounting for dynamical-diffraction effect) for the wMLL. The red curve shows the corresponding phase of the pupil function of the tMLL. The simulation was performed at 20 keV. For a focal length of 10 mm, the diffraction-limited focus size is 10 nm. The inset shows the focus profile for each case.