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Figure 3
Beam shape observed by a beam monitor placed at the sample position. The beam monitor is composed of a phosphor screen of 10 µm Gd2O2S:Tb, optical lens and a CCD camera. The pixel size of the image is 3 µm. The beam size is 15.1 µm × 13.6 µm, 21.2 µm × 17.3 µm, 24.9 µm × 18.4 µm and 44.5 µm × 21.4 µm (FWHM, H×V), respectively.

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