Figure 7
Thermal deformation distribution on the surface of M1 using the HEID when tuned to emit 200 eV in vertical polarization. (b) Thermal deformation distribution (black curve) and slope error (red curve) on the middle of M1 along the meridional direction. (c) Thermal deformation distribution (black curve) and circular fitting (red curve) on the middle of M1 along the sagittal direction and fit with a 70 m radius.  [article HTML]

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