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Figure 4
Images of a nickel (Ni) Siemens star test pattern to determine spatial resolution. (a) Ni fluorescence mapping of a 2 µm × 2 µm region acquired using fly-scan mode (continuous motion in the horizontal direction) with 10 nm pixel size and 30 ms dwell time per pixel. (b) Two-dimensional azimuthal power spectrum of the image indicating a cut-off spatial frequency of 20 µm−1, corresponding to a 25 nm half-period structure width. (c) One-dimensional power spectra of the image (horizontal direction in red, vertical direction in blue), indicating slightly better spatial resolution in the vertical direction.

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