Journal of Synchrotron Radiation

Volume 21, Part 2 (March 2014)

research papers

J. Synchrotron Rad. (2014). 21, 300-314    [ doi:10.1107/S1600577513032402 ]

Characterization, optimization and surface physics aspects of in situ plasma mirror cleaning

E. Pellegrin, I. Sics, J. Reyes-Herrera, C. Perez Sempere, J. J. Lopez Alcolea, M. Langlois, J. Fernandez Rodriguez and V. Carlino

Abstract: Although the graphitic carbon contamination of synchrotron beamline optics has been an obvious problem for several decades, the basic mechanisms underlying the contamination process as well as the cleaning/remediation strategies are not understood and the corresponding cleaning procedures are still under development. In this study an analysis of remediation strategies all based on in situ low-pressure RF plasma cleaning approaches is reported, including a quantitative determination of the optimum process parameters and their influence on the chemistry as well as the morphology of optical test surfaces. It appears that optimum results are obtained for a specific pressure range as well as for specific combinations of the plasma feedstock gases, the latter depending on the chemical aspects of the optical surfaces to be cleaned.

Keywords: synchrotron optics; carbon contamination; low-pressure RF plasma; X-ray photoemission spectroscopy; optical emission spectroscopy; interference microscopy.

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[ doi:10.1107/S1600577513032402/pp5040sup1.pdf ]
Details on the experimental set-up as well as on equipment and procedures; Figs. S1-S3, Tables S1-S2


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