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Figure 5
Fast scanning by moving the radiation source rather than the optic or the specimen. As will be seen in Table 2[link], the pixel transit time of X-ray fluorescence nanoprobes could potentially go to around 10 µs. This would lead to high velocities and acceleration/deceleration cycles on scanned optics or specimens. An alternative in the case of single optic beamline designs (Fig. 4a[link]) and true single-coherent-mode sources could be to scan the source in both position (to move the nanofocus beam point) and angle (so that the beam illuminates the nanofocusing optic as the source position changes). The range in electron beam position scanning would be large; for example, the demagnification of 350 required to image a 7 µm source to a 20 nm focus would require the source to be scanned over a 3.5 mm range in order to produce a 10 µm scanned image field. This would be challenging for electron beam orbit feedback systems to maintain stability, and it may therefore be unrealistic; however, fast scanning of specimens or optics is also challenging.

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