Figure 1
RHEED patterns obtained in the [110] direction of the substrate after growth of 6–9 nm-thick Gd2O3 at 250°C for different oxygen partial pressures: (a) without additional oxygen (5 × 10−8 mbar pressure during growth), (b) with additional oxygen (2 × 10−7 mbar) and (c) with additional oxygen (2 × 10−7 mbar) with a temperature ramp up during growth. |