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Figure 4
Scanning electron (a) and X-ray micrographs (b, c) of the Siemens star (Ta on SiN; XRESO-50HC, NTT-AT, Japan). Numbers along the upper right diagonal indicate feature sizes in µm. (c) Enlargement of the central part of (b) revealing the smallest distinguishable bars of sizes 0.1–0.2 µm.

Journal logoSTRUCTURAL
ISSN: 2059-7983
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