Figure 4
Scanning electron (a) and X-ray micrographs (b, c) of the Siemens star (Ta on SiN; XRESO-50HC, NTT-AT, Japan). Numbers along the upper right diagonal indicate feature sizes in µm. (c) Enlargement of the central part of (b) revealing the smallest distinguishable bars of sizes 0.1–0.2 µm. |