|
Figure 2
Spin curves showing COC film thickness as a function of spin speeds for different concentrations of COC 6017 dissolved in sec-butylbenzene. |
Open
access
![Open Access](/logos/open.png)
|
Figure 2
Spin curves showing COC film thickness as a function of spin speeds for different concentrations of COC 6017 dissolved in sec-butylbenzene. |