The ultrasound-induced narrowing effect of rocking curves in strained silicon crystals

Surface acoustic waves were combined with double-crystal X-ray diffractometry in order to study strained silicon crystals. A narrowing effect in the rocking curves was observed owing to the ultrasound-induced modification of the X-ray trajectories. It is shown that the narrowing effect is strongly related to the lattice strain and can be used to increase the strain sensitivity of the X-ray diffraction technique.