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Figure 19
The contribution of surface roughness to the GISAXS intensity maps. A typical GISAXS map measured on the surface of a (Ge+SiO2)/SiO2 multilayer. |
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Figure 19
The contribution of surface roughness to the GISAXS intensity maps. A typical GISAXS map measured on the surface of a (Ge+SiO2)/SiO2 multilayer. |