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Figure 12
Calculated defocus series of a single Sb atom (Z = 51) on the exit surface of 110 silicon 50 Å thick (256 by 256 pixels). Beam energy 200 kV, CS3 = 0.5 mm, objective angle 20 mrad, condenser angle 0.1 mrad, defocus spread 50 Å, and defocus of (a) 434 Å, (b) 662 Å, (c) 830 Å, (d) 970 Å, (e) 1091 Å. Scale bar 5 Å. |