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Figure 3
Calculated phase-grating images of 110 silicon at 100 kV and condenser angle of 0.1 mrad. (a) CS3 = 0.7 mm, [\Delta f] = 623 Å, objective aperture of 14 mrad and defocus spread of 50 Å. (b) With aberration correction, CS5 = 50 mm, CS3 = −0.06718 mm, [\Delta f] = −178 Å, objective aperture of 40 mrad and defocus spread of 20 Å. Scale bar is 2 Å.

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