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Figure 4
Simulations of the specular reflection intensity and GID azimuthal rocking curve. Model: Si mono-crystal with various thicknesses of the distorted layer: (a) d = 0 nm, (b) d = 2 nm, (c) d = 5 nm and (d) d = 12 nm. Incident angle [\theta_0] = 0.5°, wavelength λ = 0.154 nm. Single Si crystal, surface orientation (001), scattering crystal planes series {220}, miscut angle ψ = 2°.

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