Specular reflection intensity modulated by grazing-incidence diffraction in a wide angular range

Nikolaev, K.V.; Makhotkin, I.A.; Yakunin, S.N.; Kruijs, R.W.E.; Chuev, M.A.; Bijkerk, F.

doi:10.1107/S2053273318008963

Acta Crystallographica Section A
Acta Crystallographica
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Figure 5
Specular reflection intensity. Comparison between ideal curve and measurement simulation. Instrument model parameters: Ge {220} monochromator, wavelength (Co Kα-line) λ = 0.18 nm, photon energy dispersion δE = 1.1 eV, incidence angle $[\theta_0]$ = 0.7°, angular divergence in the azimuthal direction δφ = 15 arcsec, direct beam intensity I = 10⁴ c.p.s., measurement time 85 min. Sample model: single Si crystal, surface orientation (001), scattering crystal planes series {220}, miscut angle ψ = 1°, with distorted d = 7 nm-thick layer.

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ISSN: 2053-2733

Volume 74| Part 5| September 2018| Pages 545-552

https://doi.org/10.1107/S2053273318008963

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