Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K.V.; Yakunin, S.N.; Makhotkin, I.A.; Rie, J.; Medvedev, R.V.; Rogachev, A.V.; Trunckin, I.N.; Vasiliev, A.L.; Hendrikx, C.P.; Gateshki, M.; Kruijs, R.W.E.; Bijkerk, F.

doi:10.1107/S2053273318017382

Acta Crystallographica Section A
Acta Crystallographica
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Figure 4
GISAXS (a) simulation of scattering from interface roughness, (b) experimental data; a black solid contour separates two areas: the inner area is mostly affected by interface roughness; the outer area is mostly affected by density fluctuations. (c) Simulation of scattering from density fluctuations inside the Si layers.

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ISSN: 2053-2733

Volume 75| Part 2| March 2019| Pages 342-351

https://doi.org/10.1107/S2053273318017382

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