Grazing-incidence small-angle X-ray scattering study of correlated lateral density fluctuations in W/Si multilayers

Nikolaev, K.V.; Yakunin, S.N.; Makhotkin, I.A.; Rie, J.; Medvedev, R.V.; Rogachev, A.V.; Trunckin, I.N.; Vasiliev, A.L.; Hendrikx, C.P.; Gateshki, M.; Kruijs, R.W.E.; Bijkerk, F.

doi:10.1107/S2053273318017382

Acta Crystallographica Section A
Acta Crystallographica
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Figure 8
Form factor function $[|\hat F({\bf q})|^2]$ with various values of the lateral size: (a) d_L = 2 nm, (b) d_L = 4.7 nm, (c) d_L = 12 nm; and with various values of the vertical size: (d) d_z = 1.3 nm, (e) d_z = 1.7 nm, (f) d_z = 2.3 nm.

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ISSN: 2053-2733

Volume 75| Part 2| March 2019| Pages 342-351

https://doi.org/10.1107/S2053273318017382

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