Resolving 500 nm axial separation by multi-slice X-ray ptychography

Huang, X.; Yan, H.; He, Y.; Ge, M.; Öztürk, H.; Fang, Y.-L.L.; Ha, S.; Lin, M.; Lu, M.; Nazaretski, E.; Robinson, I.K.; Chu, Y.S.

doi:10.1107/S2053273318017229

Acta Crystallographica Section A
Acta Crystallographica
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Figure 1
(a) Experimental setup for the multi-slice ptychography measurement. The order-sorting aperture (OSA) is not shown for simplicity. (b) The incident 12 keV X-ray beam was focused to a 12 × 12 nm spot by a crossed pair of MLLs. (c), (d) The X-ray wavefronts on the front and rear surfaces of the sample, which was placed 10 µm downstream from the focal plane. (e), (f) The SEM images of the gold zone plate structure and nickel oxide particles on the front and rear surfaces measured with 30 and 5 keV electron-beam energies, respectively. The dotted red boxes indicate the X-ray scanned area.

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ISSN: 2053-2733

Volume 75| Part 2| March 2019| Pages 336-341

https://doi.org/10.1107/S2053273318017229

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