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Figure 5
The error-function fittings to the edge profiles of the reconstructed phase images estimate 8.7 and 15.0 nm resolutions on (a) the front and (b) rear surfaces, respectively. |
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Figure 5
The error-function fittings to the edge profiles of the reconstructed phase images estimate 8.7 and 15.0 nm resolutions on (a) the front and (b) rear surfaces, respectively. |