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Figure 1
(a) A schematic diagram of the Monte Carlo simulation method. The incident electron travels a distance s before being inelastically scattered by polar angle θ and azimuthal angle ϕ. (b) An illustration of how the electron-beam wavefunction is altered by a single inelastic scattering event at a depth s in a specimen of thickness t. φg(0) is the incident-beam wavefunction, [\boldvarphi_{\bf g}^{\rm e} (s)] is the elastic scattered wavefunction at a depth s and [\boldvarphi_{\bf g}^{\rm i} (t)] is the inelastic wavefunction at the specimen exit surface.

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ISSN: 2053-2733
Volume 80| Part 2| March 2024| Pages 178-188
https://doi.org/10.1107/S2053273323010690
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