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Figure 1
PED simulation results for a 500 Å-thick Si [001] specimen with 2° beam precession angle. (a) R ratio [equation (29[link])] for diffracted beam intensities plotted as a function of specimen depth. The Bragg beam intensities were calculated using the physical optics Bloch wave method for slice thicknesses of 10, 5 and 2 Å. A total of 441 reflections, including those kinematically forbidden by the diamond glide plane, were used to calculate the R ratio. Comparison of the (b) 000, (c) 220 and (d) 400 reflection intensity pendellösung calculated using physical optics Bloch wave (2 Å slice thickness) and multislice.

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ISSN: 2053-2733
Volume 81| Part 2| March 2025|
https://doi.org/10.1107/S2053273325000142
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