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Figure 2
Physical optics Bloch wave simulated electron diffraction patterns for a 15 mrad semi-convergence angle, aberration-free STEM probe positioned (a) on an atom column and (b) off an atom column in a 500 Å-thick Si [001] specimen. The two STEM probe positions are indicated by the crosses labelled `A' and `B' in Fig. 3 ![]() |