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Figure 4
Multislice simulated 4D STEM images for (a) BF, (b) ABF and (c) MAADF imaging modes. The collection angles are 0–5 mrad for BF, 10–15 mrad for ABF and 30–50 mrad for MAADF. The aberration-free STEM probe semi-convergence angle was 15 mrad. The specimen is 500 Å-thick silicon, and the field of view spans a single unit cell in [001] projection. |