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![[Figure 1]](gm5118fig1mag.jpg)
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Figure 1
(a) Plan view of a specimen containing a square imaged feature of size δ surrounded by picture elements (pixels) of equal size. The analysis of round or spherical features will lead to identical equations, except for internal factors of π/4 or π/6. (b) Number of detected electrons per pixel as a function of distance x along the specimen. (c) Cross section of a very thin sample, showing the volume contributing to the damage-limited resolution (DLR) of dimension δ. (d) Cross section of a sample whose thickness t is equal to the size of the voxel DLR δv. (e) Cross section or a thicker sample (t > δv) showing a columnar DLR δc (appropriate to features extending between both surfaces) and a voxel DLR δv appropriate to equiaxed features. |
![[Figure 1]](gm5118fig1.jpg)
 | STRUCTURAL BIOLOGY |
ISSN: 2059-7983
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