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Figure 2
Scattering geometry of the µGISAXS experiment. αi is incident angle, αf is exit angle, 2θ is out-of-plane angle. x, y and z denote a Cartesian coordinate system and qy and qz a reciprocal space coordinate system. qy and qz are the components of the wavevector transfer parallel and vertical to the sample surface and are defined as qz = 2π/λ(sinαi + sinαf) and qy ≃ 2π/λsin2θ with λ being the wavelength. The µGISAXS data are recorded on a two-dimensional detector. SBS denotes the specular beam stop and Yon the Yoneda peak.

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