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Figure 1
Procedure for the preparation on nanoporous dielectric thin films from the PMSSQ precursor (curable dielectric matrix) and triethoxysilyl-terminated star-shaped PCL porogen (mPCL6, thermally labile porogen).

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 40| Part s1| December 2007| Pages s626-s630
doi:10.1107/S0021889806047509
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