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Figure 3
Pore radius distribution determined from the GIXS data analysis of an SiOCH film deposited with a BTMSM flow rate ratio of Rfr = 65–85% and subsequently annealed at 673 K.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 40| Part s1| December 2007| Pages s614-s619
doi:10.1107/S0021889806054124
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