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Figure 1
(a) TGA thermograms of the PMSSQ precursor, PCL6 porogen, and blend samples. The measurements were carried out at a heating rate of 2.0 K min−1 under a nitrogen atmosphere. (b) TEM image of a nanoporous PMSSQ dielectric prepared from a PMSSQ precursor sample loaded with 10.0 wt% PCL6 porogen.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 40| Part s1| January 2007| Pages s631-s636
doi:10.1107/S0021889806055865
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