Figure 4
(a) Porogen and pore radii and their radius distributions determined from the GISAXS analysis of the in-plane scattering profile data in Figs. 3(a) and 3(b). (b) Average radii of porogens and pores in the PMSSQ films determined from the GISAXS analysis of the in-plane scattering profile data obtained for the films loaded with 10 and 20 wt% PCL6 porogen. |