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Figure 1
(a) Schematic of the experimental setup for thin-film deposition, using a segmented VC/AlN target. (b) Chemical compositon of V–Al–C–N thin films at different positions X below the target. (c) Coating thickness at different positions X.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 46| Part 4| July 2013| Pages 1064-1075
doi:10.1107/S0021889813014477
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