Composition-dependent structure of polycrystalline magnetron-sputtered V–Al–C–N hard coatings studied by XRD, XPS, XANES and EXAFS

Krause, B.; Darma, S.; Kaufholz, M.; Mangold, S.; Doyle, S.; Ulrich, S.; Leiste, H.; Stüber, M.; Baumbach, T.

doi:10.1107/S0021889813014477

Journal of Applied Crystallography Journal of Applied
Crystallography

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Figure 7
Comparison of the pre-edge peak intensity of the V–Al–C–N coatings and the calculated pre-edge peak intensity of VC with similar coating thickness. (a) Maximum intensity I_max as a function of the incident angle Φ, (b) I_max measured at $[\Phi = 45^{\circ}]$ for different positions X below the target, (c) intensity difference ΔI_F = I_max − I_min as a function of Φ, and (d) ΔI_F at different X. Experimental data for coatings on cemented carbide (filled squares) and on Si(001) (black dots) are shown. The calculated values for VC assuming the thickness of the coatings on cemented carbide and on Si(001) are represented by open squares and open circles.

JOURNAL OF
APPLIED
CRYSTALLOGRAPHY

ISSN: 1600-5767

Volume 46| Part 4| July 2013| Pages 1064-1075

doi:10.1107/S0021889813014477

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