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Figure 2
Measured RSMs of the symmetric 004 Bragg reflection for Si0.4Ge0.6/Si samples of thickness 6 nm (a), 29 nm (b) and 200 nm (c). The inclined stripes on the right-hand map are due to diffractometer optics and do not contain information about the investigated sample. [q_{x} = 2\pi q_{x}]. The intensity changes between isointensity contours by a factor of two.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 46| Part 4| June 2013| Pages 898-902
doi:10.1107/S0021889813010492
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