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Figure 1
Boundary profiles of a grating with a period of 136 nm, blaze angle of 6° and 30 pairs of Mo/Si coating layers with period Δ = 7 nm. See §4.1[link] for the growth parameters used. For the sake of convenience, not all of the boundary profiles are presented.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 46| Part 4| June 2013| Pages 926-932
doi:10.1107/S0021889813012387
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