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Figure 3
Boundary profiles of a grating with a period 100 nm, blaze angle 6° and 20 pairs of Al/Zr coating layers. See §4.2[link] for the growth parameters used. For the sake of convenience, not all of the boundary profiles are presented.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 46| Part 4| June 2013| Pages 926-932
doi:10.1107/S0021889813012387
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