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Figure 7
TiN 200 reflections collected at different depths from as-deposited (a), (c) and blasted (b), (d) coatings depicted for two diffraction vector orientations δ = 0° ([\psi = \theta]) and δ = 90° (cf. Fig. 2[link]). The diffraction peak width varation across the depth is caused (i) by the blasting for depths of 0–2 µm in (b), (d) and (ii) by the deposition temperature change at about 5.5 µm depth in both samples.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 46| Part 5| October 2013| Pages 1378-1385
https://doi.org/10.1107/S0021889813019535
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