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Figure 12
Normalized experimental rocking curves of the Si 111 reflections recorded using a laboratory source of 8.05 keV for a series of silicon samples produced through different processing steps: Sample 2 – optical polishing (1 µm diamond grain); Samples 3–5 – like Sample 2 but in addition one (Sample 3) to three (Sample 5) etching steps of 10 min each; Sample 6 – like Sample 5 with one MCP step between the optical polishing and the chemical etching(s); Theo – theoretical curve for a perfect crystal.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 47| Part 4| August 2014| Pages 1304-1314
https://doi.org/10.1107/S1600576714012527
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