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Figure 5
Illustration of the scattering geometry of Si(001) substrates misoriented by 6° toward the [110] direction.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 48| Part 3| June 2015| Pages 702-710
https://doi.org/10.1107/S1600576715009954
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