view article
Figure 3
Lattice spacing d dependencies on [\sin ^2\delta] evaluated from two-dimensional data collected during the scanning experiment at the TSV edge, measurement position A, when the X-ray beam hit the via at the W film scallop hill (a) and valley (b) (cf. Fig. 1[link]b). The different slopes of the dependencies indicate varying magnitudes of residual stresses along the y direction. Filled and empty points represent lattice spacing data evaluated for δ azimuthal position intervals of 0–90 and 90–180°, respectively.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 49| Part 1| February 2016| Pages 182-187
doi:10.1107/S1600576715023419
Follow J. Appl. Cryst.
Sign up for e-alerts
E-alerts
Follow J. Appl. Cryst. on Twitter
Twitter
Follow us on facebook
Facebook
Sign up for RSS feeds
RSS