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Figure 5
Numerically determined distributions of axial (a) and tangential (b) stress dependencies at the cross section of a modelled TSV stack document the presence of tensile stresses in the W sublayer. In (c) thickness-averaged stress distributions are presented.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 49| Part 1| February 2016| Pages 182-187
doi:10.1107/S1600576715023419
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