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Figure 2
Phase plots [I(2\theta, z)] obtained using cross-sectional X-ray nanodiffraction from samples A (a), B (b) and C (c). Labels indicate the presence of hexagonal (h) and cubic (c) phases with the corresponding diffraction peaks. The transitions from hexagonal to cubic and from cubic to hexagonal phases occur at distances of ∼2.3 and 1 µm from the interface in (a) and (b), respectively. In the monolithic film C, only cubic peaks were observed. Positions I and II in (a) indicate regions for which the cross-sectional TEM micrographs in Figs. 3(a) and 3(b) and Figs. 4(a) and 4(b) were recorded, respectively. The dotted lines schematically indicate the iteratively narrowing phase, microstructure and process windows.

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