|
Figure 3
Bright-field TEM micrographs (a) and (b) were collected from film A at the cross-sectional positions denoted as I and II in Fig. 2(a). The bright and dark lines represent Al(Ti)N and Ti(Al)N nanolamellae, respectively, whose thicknesses change across the film cross section in the range of ∼3–15 nm. |
Open
access
