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Figure 3
Bright-field TEM micrographs (a) and (b) were collected from film A at the cross-sectional positions denoted as I and II in Fig. 2(a). The bright and dark lines represent Al(Ti)N and Ti(Al)N nanolamellae, respectively, whose thicknesses change across the film cross section in the range of ∼3–15 nm.

Journal logoJOURNAL OF
APPLIED
CRYSTALLOGRAPHY
ISSN: 1600-5767
Volume 49| Part 6| December 2016| Pages 2217-2225
https://doi.org/10.1107/S1600576716017258
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